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| Piezo Element (mm) |
Displacement |
Generative Force [N] |
Stiffness [kN/m] |
Resonance Frequency [Hz] |
Electrostatic Capacitance [nF] |
Price [¥] |
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| @100V | @150V | @100V | ||||||
| MTN03S50F4 | 2x3x10 | 50 | 80 | 4 | 81.4 | 1046 | 180 | 80,000 |
| MTN04S130F5 | 2x3x20 | 130 | 200 | 5 | 34.9 | 417 | 350 | 80,000 |
| MTN12S1000F113 | 10x10x80 | 750 | 1150 | 83 | 110.7 | 106 | 21600 | 295,000 |
3-Axis Stage
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